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PMSE Members Receive ACS Award for Team Innovation

Eric K. Lin, Vivek M. Prabhu, Christopher L. Soles, and Wen-li Wu from the National Institute of Standards and Technology were awarded the ACS Award for Team Innovation, sponsored by the ACS Corporation Associates, for developing quantitative measurement methods and data that led to improvements in the chemically amplified photoresists used in deep and extreme-ultraviolet lithography for semiconductor fabrication.